Gosar, Ž.; Đonlagić, D.; Pevec, S.; Gergič, B.; Mozetič, M.; Primc, G.; Vesel, A.; Zaplotnik, R.
Distribution of the Deposition Rates in an Industrial-Size PECVD Reactor Using HMDSO Precursor. Coatings 2021, 11, 1218.
https://doi.org/10.3390/coatings11101218
AMA Style
Gosar Ž, Đonlagić D, Pevec S, Gergič B, Mozetič M, Primc G, Vesel A, Zaplotnik R.
Distribution of the Deposition Rates in an Industrial-Size PECVD Reactor Using HMDSO Precursor. Coatings. 2021; 11(10):1218.
https://doi.org/10.3390/coatings11101218
Chicago/Turabian Style
Gosar, Žiga, Denis Đonlagić, Simon Pevec, Bojan Gergič, Miran Mozetič, Gregor Primc, Alenka Vesel, and Rok Zaplotnik.
2021. "Distribution of the Deposition Rates in an Industrial-Size PECVD Reactor Using HMDSO Precursor" Coatings 11, no. 10: 1218.
https://doi.org/10.3390/coatings11101218
APA Style
Gosar, Ž., Đonlagić, D., Pevec, S., Gergič, B., Mozetič, M., Primc, G., Vesel, A., & Zaplotnik, R.
(2021). Distribution of the Deposition Rates in an Industrial-Size PECVD Reactor Using HMDSO Precursor. Coatings, 11(10), 1218.
https://doi.org/10.3390/coatings11101218