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Journal: Coatings, 2021
Volume: 11
Number: 1206
Article:
Plasma Enhanced Atomic Layer Deposition of Tantalum (V) Oxide
Authors:
by
Pavel Fedorov, Denis Nazarov, Oleg Medvedev, Yury Koshtyal, Aleksander Rumyantsev, Vladimir Tolmachev, Anatoly Popovich and Maxim Yu Maximov
Link:
https://www.mdpi.com/2079-6412/11/10/1206
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