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Journal: Coatings, 2021
Volume: 11
Number: 1206

Article: Plasma Enhanced Atomic Layer Deposition of Tantalum (V) Oxide
Authors: by Pavel Fedorov, Denis Nazarov, Oleg Medvedev, Yury Koshtyal, Aleksander Rumyantsev, Vladimir Tolmachev, Anatoly Popovich and Maxim Yu Maximov
Link: https://www.mdpi.com/2079-6412/11/10/1206

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