Order Article Reprints

Fedorov P, Nazarov D, Medvedev O, Koshtyal Y, Rumyantsev A, Tolmachev V, Popovich A, Maximov MY. Plasma Enhanced Atomic Layer Deposition of Tantalum (V) Oxide. Coatings. 2021; 11(10):1206. https://doi.org/10.3390/coatings11101206

Fedorov, Pavel, Denis Nazarov, Oleg Medvedev, Yury Koshtyal, Aleksander Rumyantsev, Vladimir Tolmachev, Anatoly Popovich, and Maxim Yu Maximov. 2021. "Plasma Enhanced Atomic Layer Deposition of Tantalum (V) Oxide" Coatings 11, no. 10: 1206. https://doi.org/10.3390/coatings11101206

Fedorov, P., Nazarov, D., Medvedev, O., Koshtyal, Y., Rumyantsev, A., Tolmachev, V., Popovich, A., & Maximov, M. Y. (2021). Plasma Enhanced Atomic Layer Deposition of Tantalum (V) Oxide. Coatings, 11(10), 1206. https://doi.org/10.3390/coatings11101206