P-N Junction-Based Si Biochips with Ring Electrodes for Novel Biosensing Applications
by
Mahdi Kiani 1,*
, Nan Du 1,*, Manja Vogel 2, Johannes Raff 2, Uwe Hübner 3, Ilona Skorupa 2, Danilo Bürger 1, Stefan E. Schulz 1,4, Oliver G. Schmidt 5 and Heidemarie Schmidt 1,3,*
Mahdi Kiani 1,*, Nan Du 1,*, Manja Vogel 2, Johannes Raff 2, Uwe Hübner 3, Ilona Skorupa 2, Danilo Bürger 1, Stefan E. Schulz 1,4, Oliver G. Schmidt 5 and Heidemarie Schmidt 1,3,*
1
Department Back-End of Line, Fraunhofer Institute for Electronic Nano Systems, Technologie-Campus 3, 09126 Chemnitz, Germany
2
Helmholtz-Zentrum Dresden-Rossendorf, Bautzner Landstraße 400, 01328 Dresden, Germany
3
Leibniz Institute of Photonic Technology, Albert-Einstein-Str. 9, 07745 Jena, Germany
4
Center for Microtechnologies, Chemnitz University of Technology, Reichenhainer Str. 70, 09126 Chemnitz, Germany
5
Institute for Integrative Nanosciences IFW Dresden, Helmholtzstr. 20, 01069 Dresden, Germany
*
Authors to whom correspondence should be addressed.
Biosensors 2019, 9(4), 120; https://doi.org/10.3390/bios9040120
Received: 28 August 2019 / Revised: 26 September 2019 / Accepted: 2 October 2019 / Published: 11 October 2019
(This article belongs to the Special Issue Bioelectric Sensors)
In this work, we report on the impedance of p-n junction-based Si biochips with gold ring top electrodes and unstructured platinum bottom electrodes which allows for counting target biomaterial in a liquid-filled ring top electrode region. The systematic experiments on p-n junction-based Si biochips fabricated by two different sets of implantation parameters (i.e. biochips PS5 and BS5) are studied, and the comparable significant change of impedance characteristics in the biochips in dependence on the number of bacteria suspension, i.e., Lysinibacillus sphaericus JG-A12, in Deionized water with an optical density at 600 nm from OD600 = 4–16 in the electrode ring region is demonstrated. Furthermore, with the help of the newly developed two-phase electrode structure, the modeled capacitance and resistance parameters of the electrical equivalent circuit describing the p-n junction-based biochips depend linearly on the number of bacteria in the ring top electrode region, which successfully proves the potential performance of p-n junction-based Si biochips in observing the bacterial suspension. The proposed p-n junction-based biochips reveal perspective applications in medicine and biology for diagnosis, monitoring, management, and treatment of diseases.
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Keywords:
biochips; impedance spectroscopy; electrical equivalent circuit; biomaterial; Lysinibacillus sphaericus JG-A12
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MDPI and ACS Style
Kiani, M.; Du, N.; Vogel, M.; Raff, J.; Hübner, U.; Skorupa, I.; Bürger, D.; Schulz, S.E.; Schmidt, O.G.; Schmidt, H. P-N Junction-Based Si Biochips with Ring Electrodes for Novel Biosensing Applications. Biosensors 2019, 9, 120.
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