Role of Ambient Hydrogen in HiPIMS-ITO Film during Annealing Process in a Large Temperature Range
Abstract
:1. Introduction
2. Materials and Methods
3. Results and Discussion
4. Conclusions
Author Contributions
Funding
Data Availability Statement
Conflicts of Interest
References
- Forouhi, A.R.; Li, G.G.; Bloomer, I. Optical characterization of ITO films used in flat panel displays. In Metrology, Inspection, and Process Control for Microlithography X; Jones, S.K., Ed.; International Society for Optics and Photonics: Santa Clara, CA, USA, 1996; Volume 2725, pp. 471–477. [Google Scholar]
- Kim, K.-K.; Kim, H.; Lee, S.-N.; Cho, S. Structural, optical, and electrical properties of E-beam and sputter-deposited ITO films for LED applications. Electron. Mater. Lett. 2011, 7, 145–149. [Google Scholar] [CrossRef]
- Saim, H.; Campbell, D. Properties of indium-tin-oxide (ITO)/silicon heterojunction solar cells by thick-film techniques. Sol. Energy Mater. 1987, 15, 249–260. [Google Scholar] [CrossRef]
- Lee, S.J.; Lee, S.H.; Kang, H.W.; Nahm, S.; Kim, B.H.; Kim, H.; Han, S.H. Flexible electrochromic and thermochromic hybrid smart window based on a highly durable ITO/graphene transparent electrode. Chem. Eng. J. 2021, 416, 129028. [Google Scholar] [CrossRef]
- Canhola, P.; Martins, N.; Raniero, L.; Pereira, S.; Fortunato, E.; Ferreira, I. Role of annealing environment on the performances of large area ITO films produced by rf magnetron sputtering. Thin Solid Films 2005, 487, 271–276. [Google Scholar] [CrossRef]
- Ghorannevis, Z.; Akbarnejad, E.; Ghoranneviss, M. Structural and morphological properties of ITO thin films grown by magnetron sputtering. J. Theor. Appl. Phys. 2015, 9, 285–290. [Google Scholar] [CrossRef] [Green Version]
- Demirhan, Y.; Koseoglu, H.; Turkoglu, F.; Uyanik, Z.; Ozdemir, M.; Aygun, G.; Ozyuzer, L. The controllable deposition of large area roll-to-roll sputtered ito thin films for photovoltaic applications. Renew. Energy 2020, 146, 1549–1559. [Google Scholar] [CrossRef]
- Ritzau, K.-U.; Behrendt, T.; Palaferri, D.; Bivour, M.; Hermle, M. Hydrogen doping of Indium Tin Oxide due to thermal treatment of hetero-junction solar cells. Thin Solid Films 2016, 599, 161–165. [Google Scholar] [CrossRef]
- Prepelita, P.; Stavarache, I.; Craciun, D.; Garoi, F.; Negrila, C.; Sbarcea, B.G.; Craciun, V. Rapid thermal annealing for high-quality ITO thin films deposited by radio-frequency magnetron sputtering. Beilstein J. Nanotechnol. 2019, 10, 1511–1522. [Google Scholar] [CrossRef]
- Nguyen, T.; Le Rendu, P.; Dinh, N.; Fourmigué, M.; Mézière, C. Thermal and chemical treatment of ITO substrates for improvement of OLED performance. Synth. Met. 2003, 138, 229–232. [Google Scholar] [CrossRef]
- Gupta, S.; Ada, E. Optimization of process parameters to achieve high quality as-deposited indium-tin oxide films for display applications. J. Vac. Sci. Technol. A 2005, 23, 1173–1179. [Google Scholar] [CrossRef]
- Salami, H.; Uy, A.; Vadapalli, A.; Grob, C.; Dwivedi, V.; Adomaitis, R.A. Atomic layer deposition of ultrathin indium oxide and indium tin oxide films using a trimethylindium, tetrakis(dimethylamino)tin, and ozone precursor system. J. Vac. Sci. Technol. A 2019, 37, 010905. [Google Scholar] [CrossRef]
- Aiempanakit, M.; Kubart, T.; Larsson, P.; Sarakinos, K.; Jensen, J.; Helmersson, U. Hysteresis and process stability in reactive high power impulse magnetron sputtering of metal oxides. Thin Solid Films 2011, 519, 7779–7784. [Google Scholar] [CrossRef] [Green Version]
- Sittinger, V.; Lenck, O.; Vergöhl, M.; Szyszka, B.; Bräuer, G. Applications of HIPIMS metal oxides. Thin Solid Films 2013, 548, 18–26. [Google Scholar] [CrossRef]
- Horwat, D.; Mickan, M.; Chamorro, W. New strategies for the synthesis of ZnO and Al-doped ZnO films by reactive magnetron sputtering at room temperature. Phys. Status Solidi C 2016, 13, 951–957. [Google Scholar] [CrossRef]
- Carreri, F.; Sabelfeld, A.; Gerdes, H.; Bandorf, R.; Vergöhl, M.; Bräuer, G. HIPIMS ITO films from a rotating cylindrical cathode. Surf. Coat. Technol. 2016, 290, 65–72. [Google Scholar] [CrossRef]
- Stranak, V.; Bogdanowicz, R.; Sezemský, P.; Wulff, H.; Kruth, A.; Smietana, M.; Kratochvíl, J.; Cada, M.; Hubicka, Z. Towards high quality ITO coatings: The impact of nitrogen admixture in HiPIMS discharges. Surf. Coat. Technol. 2018, 335, 126–133. [Google Scholar] [CrossRef]
- Al-Kuhaili, M.F. Electrical conductivity enhancement of indium tin oxide (ITO) thin films reactively sputtered in a hydrogen plasma. J. Mater. Sci. Mater. Electron. 2020, 31, 2729–2740. [Google Scholar] [CrossRef]
- Yang, S.-H.; Lee, D.-M.; Kim, J.-K.; Kang, J.-W.; Lee, J.-M. Enhanced optical and electrical properties of ITO on a PET substrate by hydrogen plasma and HCl treatment. J. Phys. D Appl. Phys. 2013, 46, 125103. [Google Scholar] [CrossRef]
- Wang, R.X.; Beling, C.D.; Fung, S.; Djurišić, A.B.; Ling, C.C.; Kwong, C.; Li, S. Influence of annealing temperature and environment on the properties of indium tin oxide thin films. J. Phys. D Appl. Phys. 2005, 38, 2000–2005. [Google Scholar] [CrossRef]
- Chang, S.-C. Low-pressure H2/N2 annealing on indium tin oxide film. Microelectron. J. 2007, 38, 1220–1225. [Google Scholar] [CrossRef]
- Yin, W.; Smithe, K.; Weiser, P.; Stavola, M.; Fowler, W.B.; Boatner, L.; Pearton, S.J.; Hays, D.C.; Koch, S.G. Hydrogen centers and the conductivity of In2O3 single crystals. Phys. Rev. B 2015, 91, 075208. [Google Scholar] [CrossRef] [Green Version]
- Bekisli, F.; Stavola, M.; Fowler, W.B.; Boatner, L.; Spahr, E.; Lüpke, G. Hydrogen impurities and shallow donors in SnO2studied by infrared spectroscopy. Phys. Rev. B 2011, 84, 035213. [Google Scholar] [CrossRef] [Green Version]
- Morales-Masis, M.; Ding, L.; Dauzou, F.; Jeangros, Q.; Hessler-Wyser, A.; Nicolay, S.; Ballif, C. Hydrogen plasma treatment for improved conductivity in amorphous aluminum doped zinc tin oxide thin films. APL Mater. 2014, 2, 096113. [Google Scholar] [CrossRef] [Green Version]
- Luo, S.; Kohiki, S.; Okada, K.; Shoji, F.; Shishido, T. Hydrogen Effects on Crystallinity, Photoluminescence, and Magnetization of Indium Tin Oxide Thin Films Sputter-Deposited on Glass Substrate without Heat Treatment: Hydrogen Effects on Crystallinity, PL, and Magnetization of ITO Films. Phys. Status Solidi 2010, 207, 386–390. [Google Scholar] [CrossRef] [Green Version]
- Kosarian, A.; Shakiba, M.; Farshidi, E. Role of hydrogen treatment on microstructural and opto-electrical properties of amorphous ITO thin films deposited by reactive gas-timing DC magnetron sputtering. J. Mater. Sci. Mater. Electron. 2017, 28, 10525–10534. [Google Scholar] [CrossRef]
- Álvarez-Fraga, L.; Jiménez-Villacorta, F.; Sánchez-Marcos, J.; de Andrés, A.; Prieto, C. Indium-tin oxide thin films deposited at room temperature on glass and PET substrates: Optical and electrical properties variation with the H2–Ar sputtering gas mixture. Appl. Surf. Sci. 2015, 344, 217–222. [Google Scholar] [CrossRef]
- Luo, S.N.; Kono, A.; Nouchi, N.; Shoji, F. Effective creation of oxygen vacancies as an electron carrier source in tin-doped indium oxide films by plasma sputtering. J. Appl. Phys. 2006, 100, 113701. [Google Scholar] [CrossRef]
- Luo, S.; Okada, K.; Kohiki, S.; Tsutsui, F.; Shimooka, H.; Shoji, F. Optical and electrical properties of indium tin oxide thin films sputter-deposited in working gas containing hydrogen without heat treatments. Mater. Lett. 2009, 63, 641–643. [Google Scholar] [CrossRef] [Green Version]
- Okada, K.; Kohiki, S.; Luo, S.; Sekiba, D.; Ishii, S.; Mitome, M.; Kohno, A.; Tajiri, T.; Shoji, F. Correlation between resistivity and oxygen vacancy of hydrogen-doped indium tin oxide thin films. Thin Solid Films 2011, 519, 3557–3561. [Google Scholar] [CrossRef] [Green Version]
- Zhao, M.-J.; Zhang, J.-F.; Huang, J.; Huang, Q.-H.; Wu, W.-Y.; Tseng, M.-C.; Huang, C.-J.; Kuo, H.-C.; Lien, S.-Y.; Zhu, W.-Z. Effect of power density on compositional and structural evolution of ITO thin film by HiPIMS method. Vacuum 2022, 200, 111034. [Google Scholar] [CrossRef]
- Zhao, M.-J.; Zhang, J.-F.; Huang, Q.-H.; Wu, W.-Y.; Tseng, M.-C.; Lien, S.-Y.; Zhu, W.-Z. Effect of working pressure on Sn/In composition and optoelectronic properties of ITO films prepared by high power impulse magnetron sputtering. Vacuum 2021, 196, 110762. [Google Scholar] [CrossRef]
- Van de Walle, C.G. Hydrogen as a Cause of Doping in Zinc Oxide. Phys. Rev. Lett. 2000, 85, 1012–1015. [Google Scholar] [CrossRef] [Green Version]
- Panneerdoss, I.J.; Jeyakumar, S.J.; Ramalingam, S.; Jothibas, M. Characterization of prepared In2O3 thin films: The FT-IR, FT-Raman, UV–Visible investigation and optical analysis. Spectrochim. Acta Part A Mol. Biomol. Spectrosc. 2015, 147, 1–13. [Google Scholar] [CrossRef]
- Jothibas, M.; Manoharan, C.; Ramalingam, S.; Dhanapandian, S.; Jeyakumar, S.J.; Bououdina, M. Preparation, characterization, spectroscopic (FT-IR, FT-Raman, UV and visible) studies, optical properties and Kubo gap analysis of In2O3 thin films. J. Mol. Struct. 2013, 1049, 239–249. [Google Scholar] [CrossRef]
- Mickan, M.; Stoffel, M.; Rinnert, H.; Helmersson, U.; Horwat, D. Restoring the Properties of Transparent Al-Doped ZnO Thin Film Electrodes Exposed to Ambient Air. J. Phys. Chem. C 2017, 121, 14426–14433. [Google Scholar] [CrossRef]
- Dřínek, V.; Vacek, K.; Yuzhakov, G.; Bastl, Z. Interaction between the silyl and silylen centres in the deposits prepared by pulsed laser ablation of silicon monoxide and ammonia, methylamine and dimethylamine. Appl. Phys. A 2005, 81, 1019–1023. [Google Scholar] [CrossRef]
- Tamahkar, E.; Özkahraman, B. Potential Evaluation of PVA-Based Hydrogels for Biomedical Applications. Hittite J. Sci. Eng. 2015, 2, 165–171. [Google Scholar] [CrossRef] [Green Version]
- Wu, B.; Zheng, N.; Fu, G. Small molecules control the formation of Pt nanocrystals: A key role of carbon monoxide in the synthesis of Pt nanocubes. Chem. Commun. 2010, 47, 1039–1041. [Google Scholar] [CrossRef] [PubMed]
- Rey, J.F.Q.; Plivelic, T.S.; Rocha, R.A.; Tadokoro, S.K.; Torriani, I.; Muccillo, E.N.S. Synthesis of In2O3nanoparticles by thermal decomposition of a citrate gel precursor. J. Nanoparticle Res. 2005, 7, 203–208. [Google Scholar] [CrossRef]
- Kulkarni, S.; Patil, D.S. Synthesis and characterization of uniform spherical shape nanoparticles of indium oxide. J. Mater. Sci. Mater. Electron. 2015, 27, 3731–3735. [Google Scholar] [CrossRef]
- Khan, M.A.M.; Khan, W.; Ahamed, M.; Alsalhi, M.S.; Ahmed, T. Crystallite structural, electrical and luminescent characteristics of thin films of In2O3 nanocubes synthesized by spray pyrolysis. Electron. Mater. Lett. 2013, 9, 53–57. [Google Scholar] [CrossRef]
- Qin, S.; Wang, J.; Zhao, C.; Zhang, S. Long-Term, Low Temperature Simulation of Early Diagenetic Alterations of Organic Matter: A FTIR Study. Energy Explor. Exploit. 2010, 28, 365–376. [Google Scholar] [CrossRef]
- Ullah, R.; Ahmad, I.; Zheng, Y.-X. Fourier Transform Infrared Spectroscopy of “Bisphenol A”. J. Spectrosc. 2016, 2016, 2073613. [Google Scholar] [CrossRef]
- Elhalawaty, S.; Sivaramakrishnan, K.; Theodore, N.; Alford, T. The effect of sputtering pressure on electrical, optical and structure properties of indium tin oxide on glass. Thin Solid Films 2010, 518, 3326–3331. [Google Scholar] [CrossRef]
- Oo, W.M.H.; Tabatabaei, S.; McCluskey, M.; Varley, J.B.; Janotti, A.; Van De Walle, C.G. Hydrogen donors inSnO2studied by infrared spectroscopy and first-principles calculations. Phys. Rev. B 2010, 82, 081201. [Google Scholar] [CrossRef] [Green Version]
- Ugur, D.; Storm, A.; Verberk, R.; Brouwer, J.; Sloof, W. Decomposition of SnH4 molecules on metal and metal–oxide surfaces. Appl. Surf. Sci. 2014, 288, 673–676. [Google Scholar] [CrossRef]
- Wang, X.; Andrews, L. Infrared Spectra of Indium Hydrides in Solid Hydrogen and Neon. J. Phys. Chem. A 2004, 108, 4440–4448. [Google Scholar] [CrossRef]
- Thirumoorthi, M.; Prakash, J.T.J. Structure, optical and electrical properties of indium tin oxide ultra thin films prepared by jet nebulizer spray pyrolysis technique. J. Asian Ceram. Soc. 2016, 4, 124–132. [Google Scholar] [CrossRef] [Green Version]
- Thirumoorthi, M.; Prakash, J.T.J. Structural, morphological characteristics and optical properties of Y doped ZnO thin films by sol–gel spin coating method. Superlattices Microstruct. 2015, 85, 237–247. [Google Scholar] [CrossRef]
- Lin, T.-C.; Chang, S.-C.; Chiu, C.-F. Annealing effect of ITO and ITO/Cu transparent conductive films in low pressure hydrogen atmosphere. Mater. Sci. Eng. B 2006, 129, 39–42. [Google Scholar] [CrossRef]
- Kim, S.J. Preparation of Indium Tin Oxide Thin Film by Rapid Thermal Annealing Treatment. IJIRSET 2007, 5, 14. [Google Scholar] [CrossRef]
- Peng, Y.M.; Su, Y.K.; Yang, R.Y. Influence of Annealing Atmosphere on the Characteristics of Sol-Gel Derived ITO Thin Films. Adv. Mater. Res. 2013, 684, 279–284. [Google Scholar] [CrossRef]
- Wang, R.X.; Beling, C.D.; Fung, S.; Djurisic, A.B.; Kwong, C.Y.; Li, S. The Effect of Thermal Annealing on the Properties of Indium Tin Oxide Thin Films. In Proceedings of the Conference on Optoelectronic and Microelectronic Materials and Devices, Brisbane, Australia, 8–10 December 2004; pp. 57–60. [Google Scholar] [CrossRef] [Green Version]
- Sezemsky, P.; Burnat, D.; Kratochvil, J.; Wulff, H.; Kruth, A.; Lechowicz, K.; Janik, M.; Bogdanowicz, R.; Cada, M.; Hubicka, Z.; et al. Tailoring properties of indium tin oxide thin films for their work in both electrochemical and optical label-free sensing systems. Sens. Actuators B Chem. 2021, 343, 130173. [Google Scholar] [CrossRef]
- Jun, F.; Biwen, L.; Wenbo, C.; Meiyan, C.; Fanya, J.; Min, D. Preparation of ITO Coating on PMMA by High-Power Pulse Magnetron Sputtering. Rare Met. Mater. Eng. 2020, 49, 2229–2233. [Google Scholar]
Parameter | Value |
---|---|
Base pressure (×10−5 Pa) | 6.7 |
Working pressure (Pa) | 8.0 |
Distance of substrate-to-target (mm) | 52 |
Average power (W) | 500 |
Flow rate of Ar (sccm) | 40 |
Deposition temperature (°C) | 25 |
Frequency (Hz) | 1000 |
Pulse length (μs) | 100 |
Duty cycle (%) | 10 |
Parameter | Value |
---|---|
Temperature (°C) | 300–800 |
Duration (min) | 40 |
Atmosphere | N2 (95%) + H2 (5%) |
Gas flow rate (L/min) | 1 |
Temperature (°C) | Sn4+/(Sn4+ + Sn2+) (%) | OV/(OV + OL) (%) |
---|---|---|
25 | 75.0 | 45.1 |
300 | 73.0 | 45.6 |
400 | 70.2 | 47.2 |
500 | 69.3 | 47.6 |
600 | 70.0 | 46.5 |
700 | 71.9 | 44.1 |
750 | 69.8 | 42.0 |
Wavenumber (cm−1) | Assignments |
---|---|
3680 | Si-OH |
2260, 2020 | Si-H |
1904, 1802 | C-O |
1603, 1460 | water |
1350,832 | C-H |
1291, 531 | C-O |
520 | In-O |
Method | H2/N2 Ratio (%) | Annealing Temp. (°C) | ρ (Ω·cm) | Ave. T (%) | Ref. | ||
---|---|---|---|---|---|---|---|
As-dep. | Post-ann. | As-dep. | Post-ann. | ||||
DCMS | 50 | 500 | 3.4 × 10−4 | 2.2 × 10−4 | 88 | 90 | [21] |
DCMS | 100 | 500 | 6.2 × 10−4 | 2.7 × 10−4 | 90 | 92 | [51] |
RFMS | 2 | 500 | 6.0 × 10−4 | 4.1 × 10−4 | 70 | 86 | [52] |
Sol-gel | 3.75 | 600 | N.A. | 4.4 × 10−2 | N.A. | 86 | [53] |
E-beam evaporation | 20 | 200 | 5.6 × 10−2 | 5.8 × 10−4 | 32 | 61 | [54] |
HiPIMS | N.A. | N.A. | 4.0 × 10−3 | N.A. | N.A. | N.A. | [16] |
HiPIMS | N.A. | N.A. | 4.0 × 10−3 | N.A. | N.A. | N.A. | [55] |
HiPIMS | N.A. | N.A. | 6.0 × 10−3 | N.A. | 82 | N.A. | [56] |
HiPIMS | 5 | 500 | 5.6 × 10−3 | 6.7 × 10−4 | 78 | 78 | This work |
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Zhao, M.-J.; Zhang, J.-F.; Huang, J.; Chen, Z.-Z.; Xie, A.; Wu, W.-Y.; Huang, C.-J.; Wuu, D.-S.; Lien, S.-Y.; Zhu, W.-Z. Role of Ambient Hydrogen in HiPIMS-ITO Film during Annealing Process in a Large Temperature Range. Nanomaterials 2022, 12, 1995. https://doi.org/10.3390/nano12121995
Zhao M-J, Zhang J-F, Huang J, Chen Z-Z, Xie A, Wu W-Y, Huang C-J, Wuu D-S, Lien S-Y, Zhu W-Z. Role of Ambient Hydrogen in HiPIMS-ITO Film during Annealing Process in a Large Temperature Range. Nanomaterials. 2022; 12(12):1995. https://doi.org/10.3390/nano12121995
Chicago/Turabian StyleZhao, Ming-Jie, Jin-Fa Zhang, Jie Huang, Zuo-Zhu Chen, An Xie, Wan-Yu Wu, Chien-Jung Huang, Dong-Sing Wuu, Shui-Yang Lien, and Wen-Zhang Zhu. 2022. "Role of Ambient Hydrogen in HiPIMS-ITO Film during Annealing Process in a Large Temperature Range" Nanomaterials 12, no. 12: 1995. https://doi.org/10.3390/nano12121995