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Communication

Flexible 3D Electrodes of Free-Standing TiN Nanotube Arrays Grown by Atomic Layer Deposition with a Ti Interlayer as an Adhesion Promoter

1
Department of Materials Science and Engineering, KAIST, Daejeon 305-701, Korea
2
Center for Environment & Sustainable Resources, Korea Research Institute of Chemical Technology (KRICT), 141 Gajeong-ro, Daejeon 34114, Korea
3
Department of Energy Science, Sungkyunkwan University, Suwon 440-746, Korea
4
KAIST Institute for NanoCentury (KINC), KAIST, Daejeon 34141, Korea
*
Authors to whom correspondence should be addressed.
These authors contributed equally to this work.
Nanomaterials 2020, 10(3), 409; https://doi.org/10.3390/nano10030409
Received: 29 January 2020 / Revised: 21 February 2020 / Accepted: 22 February 2020 / Published: 26 February 2020
(This article belongs to the Special Issue ALD Technique for Functional Coatings of Nanostructured Materials)
Nanostructured electrodes and their flexible integrated systems have great potential for many applications, including electrochemical energy storage, electrocatalysis and solid-state memory devices, given their ability to improve faradaic reaction sites by large surface area. Although many processing techniques have been employed to fabricate nanostructured electrodes onto flexible substrates, these present limitations in terms of achieving flexible electrodes with high mechanical stability. In this study, the adhesion, mechanical properties and flexibility of TiN nanotube arrays on a Pt substrate were improved using a Ti interlayer. Highly ordered and well-aligned TiN nanotube arrays were fabricated on a Pt substrate using a template-assisted method with an anodic aluminum oxide (AAO) template and atomic layer deposition (ALD) system. We show that with the use of a Ti interlayer between the TiN nanotube arrays and Pt substrate, the TiN nanotube arrays could perfectly attach to the Pt substrate without delamination and faceted phenomena. Furthermore, the I-V curve measurements confirmed that the electric contact between the TiN nanotube arrays and substrate for use as an electrode was excellent, and its flexibility was also good for use in flexible electronic devices. Future efforts will be directed toward the fabrication of embedded electrodes in flexible plastic substrates by employing the concepts demonstrated in this study. View Full-Text
Keywords: atomic layer deposition; flexible device; TiN nanotube; adhesion promoter; 3D electrode; nanomaterials atomic layer deposition; flexible device; TiN nanotube; adhesion promoter; 3D electrode; nanomaterials
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MDPI and ACS Style

Yun, S.; Kim, S.-J.; Youn, J.; Kim, H.; Ryu, J.; Bae, C.; No, K.; Hong, S. Flexible 3D Electrodes of Free-Standing TiN Nanotube Arrays Grown by Atomic Layer Deposition with a Ti Interlayer as an Adhesion Promoter. Nanomaterials 2020, 10, 409. https://doi.org/10.3390/nano10030409

AMA Style

Yun S, Kim S-J, Youn J, Kim H, Ryu J, Bae C, No K, Hong S. Flexible 3D Electrodes of Free-Standing TiN Nanotube Arrays Grown by Atomic Layer Deposition with a Ti Interlayer as an Adhesion Promoter. Nanomaterials. 2020; 10(3):409. https://doi.org/10.3390/nano10030409

Chicago/Turabian Style

Yun, Seokjung, Sang-Joon Kim, Jaesung Youn, Hoon Kim, Jeongjae Ryu, Changdeuck Bae, Kwangsoo No, and Seungbum Hong. 2020. "Flexible 3D Electrodes of Free-Standing TiN Nanotube Arrays Grown by Atomic Layer Deposition with a Ti Interlayer as an Adhesion Promoter" Nanomaterials 10, no. 3: 409. https://doi.org/10.3390/nano10030409

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