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Journal: Nanomaterials, 2020
Volume: 10
Number: 338

Article: MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion
Authors: by William Chiappim, Marcos Watanabe, Vanessa Dias, Giorgio Testoni, Ricardo Rangel, Mariana Fraga, Homero Maciel, Sebastião dos Santos Filho and Rodrigo Pessoa
Link: https://www.mdpi.com/2079-4991/10/2/338

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