Quality-Improved GaN Epitaxial Layers Grown on Striped Patterned Sapphire Substrates Ablated by Femtosecond Laser
Abstract
1. Introduction
2. Materials and Methods
3. Results and Discussion
4. Conclusions
Author Contributions
Funding
Conflicts of Interest
References
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Samples | E2 Phonon Peak (cm−1) | E2 Phonon FWHM (cm−1) | Compressive Stress (GPa) |
---|---|---|---|
planar substrate | 568.8 | 8.1 | 0.45 |
striped PSS | 569.9 | 6.7 | 0.19 |
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Xu, Y.; Zou, J.; Lin, X.; Wu, W.; Li, W.; Yang, B.; Shi, M. Quality-Improved GaN Epitaxial Layers Grown on Striped Patterned Sapphire Substrates Ablated by Femtosecond Laser. Appl. Sci. 2018, 8, 1842. https://doi.org/10.3390/app8101842
Xu Y, Zou J, Lin X, Wu W, Li W, Yang B, Shi M. Quality-Improved GaN Epitaxial Layers Grown on Striped Patterned Sapphire Substrates Ablated by Femtosecond Laser. Applied Sciences. 2018; 8(10):1842. https://doi.org/10.3390/app8101842
Chicago/Turabian StyleXu, Yichao, Jun Zou, Xiaoyan Lin, Wenjuan Wu, Wenbo Li, Bobo Yang, and Mingming Shi. 2018. "Quality-Improved GaN Epitaxial Layers Grown on Striped Patterned Sapphire Substrates Ablated by Femtosecond Laser" Applied Sciences 8, no. 10: 1842. https://doi.org/10.3390/app8101842
APA StyleXu, Y., Zou, J., Lin, X., Wu, W., Li, W., Yang, B., & Shi, M. (2018). Quality-Improved GaN Epitaxial Layers Grown on Striped Patterned Sapphire Substrates Ablated by Femtosecond Laser. Applied Sciences, 8(10), 1842. https://doi.org/10.3390/app8101842