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Journal: Appl. Sci., 2025
Volume: 15
Number: 3883
Article:
Exploring Chemical Catalytic Mechanisms for Enhancing Bonding Energy in Direct Silicon Dioxide Wafer Bonding
Authors:
by
Aziliz Calvez, Vincent Larrey, Paul Noël, François Rieutord and Frank Fournel
Link:
https://www.mdpi.com/2076-3417/15/7/3883
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