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Journal: Appl. Sci., 2021
Volume: 11
Number: 11052
Article:
Substrate-Driven Atomic Layer Deposition of High-κ Dielectrics on 2D Materials
Authors:
by
Emanuela Schilirò, Raffaella Lo Nigro, Fabrizio Roccaforte and Filippo Giannazzo
Link:
https://www.mdpi.com/2076-3417/11/22/11052
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