Wrench Model with Rotation Angles for Magnetically Levitated Actuators
Abstract
1. Introduction
2. Maglev Platform and MLA Model
2.1. Maglev Platform
2.2. Force and Torque Analysis
2.3. Dynamics Analysis and Current Decoupling
3. Construction of the Simulation System
3.1. Control Block Diagram
3.2. Physical Model Construction
4. Simulation
4.1. Coupling in Motion
4.2. Step Response and Trajectory Tracking
5. Discussion
6. Conclusions
Author Contributions
Funding
Data Availability Statement
Conflicts of Interest
Abbreviations
| MLA | Magnetic levitation actuator |
| LUT | Lookup table |
| DOF | Degree of freedom |
| FPGA | Field Programmable Gate Array |
| PID | Proportional Integral Derivative |
Appendix A
References
- Kim, W.; Trumper, D.L. High-precision magnetic levitation stage for photolithography. Precis. Eng. 1998, 22, 66–77. [Google Scholar] [CrossRef]
- EUV Lithography Systems. Available online: https://www.asml.com/en/products/euv-lithography-systems (accessed on 20 October 2025).
- Kim, W.; Verma, S.; Shakir, H. Design and precision construction of novel magnetic-levitation-based multi-axis nanoscale positioning systems. Precis. Eng. 2007, 31, 337–350. [Google Scholar] [CrossRef]
- Zhang, Z.; Menq, C.H. Six-Axis magnetic levitation and motion control. Trans. Robot. 2007, 23, 196–205. [Google Scholar] [CrossRef]
- Kim, C.H.; Kim, K.J.; Yu, J.S.; Cho, H.W. Dynamic performance evaluation of 5-DOF magnetic levitation and guidance device by using equivalent magnetic circuit Model. IEEE Trans. Magn. 2013, 49, 4156–4159. [Google Scholar] [CrossRef]
- Laro, D.; Boots, E.; van Eijk, J.; Sanders, L. Design and control of a through wall 450 mm vacuum compatible wafer stage. In Proceedings of the 13th Euspen International Conference, Berlin, Germany, 27–31 May 2013. [Google Scholar]
- Lu, X.; Yan, Y.; Qi, B.; Qian, H.; Sun, J.; Quigley, A. Contactless haptic display through magnetic field control. IEEE Trans. Haptics 2022, 15, 328–338. [Google Scholar] [CrossRef]
- Hesse, S.; Huaman, A.; Katzschmann, M.; Leistritz, B.; Herzog, L. NPS6D200—A long range nanopositioning stage with 6D closed loop control. Appl. Sci. 2024, 14, 6972. [Google Scholar] [CrossRef]
- Zhang, K.; Xu, F.; Xu, X. Observer-based fast nonlinear MPC for multi-DOF maglev positioning system: Theory and experiment. Control Eng. Pract. 2021, 114, 104860. [Google Scholar] [CrossRef]
- Jeong, J.; Ryu, J.; Gweon, D. Feedforward reference compensation using bilinear interpolation for long range motion of six degrees-of-freedom magnetic levitation planar motor. In Proceedings of the 2017 8th International Conference on Mechanical and Aerospace Engineering (ICMAE), Prague, Czech, 22–25 July 2017; pp. 75–78. [Google Scholar]
- Li, M.; Zhu, Y.; Yang, K.; Yang, L.; Hu, C.; Mu, H. Convergence rate oriented iterative feedback tuning with application to an ultraprecision wafer stage. IEEE Trans. Ind. Electron. 2019, 66, 1993–2003. [Google Scholar] [CrossRef]
- Holmes, M.; Trumper, D. Magnetic/fluid-bearing stage for atomic-scale motion control (the angstrom stage). Precis. Eng. 1996, 18, 38–49. [Google Scholar] [CrossRef]
- Zhou, L.; Wu, J. Magnetic levitation technology for precision motion systems: A review and future perspectives. Int. J. Autom. Technol. 2022, 16, 386–402. [Google Scholar] [CrossRef]
- Berkelman, P.; Dzadovsky, M. Magnetic levitation over large translation and rotation ranges in all directions. IEEE/ASME Trans. Mechatronics 2011, 18, 44–52. [Google Scholar] [CrossRef]
- Wang, Y.; Xu, Z.; Khamesee, M.B. Magnet-coil role-switching real-time wrench model for magnetic levitated motors with extendable motion range. IEEE Trans. Ind. Electron. 2025, 72, 2863–2871. [Google Scholar] [CrossRef]
- Wang, Y.; Khamesee, M.B. Deep learning-based wrench model for magnetically levitated actuators. IEEE Trans. Ind. Electron. 2024, 71, 14663–14672. [Google Scholar] [CrossRef]
- Nguyen, V.H.; Kim, W. Two-phase lorentz coils and linear Halbach array for multiaxis precision-positioning stages with magnetic levitation. IEEE/ASME Trans. Mechatron. 2017, 22, 2662–2672. [Google Scholar] [CrossRef]
- Zhu, H.; Teo, T.J.; Pang, C.K. Design and modeling of a six-degree-of-freedom magnetically levitated positioner using square coils and 1-D Halbach arrays. IEEE Trans. Ind. Electron. 2017, 64, 440–450. [Google Scholar] [CrossRef]
- Xu, F.; Lv, Y.; Xu, X.; Dinavahi, V. FPGA-based real-time wrench model of direct current driven magnetic levitation actuator. IEEE Trans. Ind. Electron. 2018, 65, 9635–9645. [Google Scholar] [CrossRef]
- Xu, F.; Lu, X.; Zheng, T.; Xu, X. Motion control of a magnetic levitation actuator based on a wrench model considering yaw angle. IEEE Trans. Ind. Electron. 2020, 67, 8545–8554. [Google Scholar] [CrossRef]
- Smith, A.C. High-Precision Planar Magnetic Levitation. Ph.D. Thesis, Miassachusetts Institute of Technology, Cambridge, UK, 1997. [Google Scholar]
- Jansen, J.W.; Van Lierop, C.M.M.; Lomonova, E.A.; Vandenput, A.J.A. Modeling of magnetically levitated planar actuators with moving magnets. IEEE Trans. Magn. 2007, 43, 15–25. [Google Scholar] [CrossRef]
- Ma, J.; Cheng, Z.; Zhu, H.; Li, X.; Tomizuka, M.; Lee, T.H. Convex parameterization and optimization for robust tracking of a magnetically levitated planar positioning system. IEEE Trans. Ind. Electron. 2021, 69, 3798–3809. [Google Scholar] [CrossRef]








| P | I | D | |
|---|---|---|---|
| 35,270 | 349,138 | 873 | |
| 45,463 | 451,243 | 1034 | |
| 45,143 | 527,944 | 874 | |
| 667 | 6263 | 16 | |
| 741 | 8818 | 14 | |
| 1609 | 17,297 | 33 |
| Test Model | Time (s) | Rotation Angle | Rmse (m) | Maximum Deviation (m) |
|---|---|---|---|---|
| 3D | 1 | (1°, 1°, 1°) | ||
| 3D | 10 | (1°, 1°, 1°) | ||
| 6D | 1 | (1°, 1°, 1°) | ||
| 6D | 1 | (0°, 0°, 0°) | ||
| 6D | 10 | (1°, 1°, 1°) | ||
| 6D | 10 | (0°, 0°, 0°) |
Disclaimer/Publisher’s Note: The statements, opinions and data contained in all publications are solely those of the individual author(s) and contributor(s) and not of MDPI and/or the editor(s). MDPI and/or the editor(s) disclaim responsibility for any injury to people or property resulting from any ideas, methods, instructions or products referred to in the content. |
© 2025 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
Share and Cite
Xiao, H.; Guo, K.; Ling, X. Wrench Model with Rotation Angles for Magnetically Levitated Actuators. Actuators 2025, 14, 562. https://doi.org/10.3390/act14110562
Xiao H, Guo K, Ling X. Wrench Model with Rotation Angles for Magnetically Levitated Actuators. Actuators. 2025; 14(11):562. https://doi.org/10.3390/act14110562
Chicago/Turabian StyleXiao, Haoxuan, Kunwei Guo, and Xiao Ling. 2025. "Wrench Model with Rotation Angles for Magnetically Levitated Actuators" Actuators 14, no. 11: 562. https://doi.org/10.3390/act14110562
APA StyleXiao, H., Guo, K., & Ling, X. (2025). Wrench Model with Rotation Angles for Magnetically Levitated Actuators. Actuators, 14(11), 562. https://doi.org/10.3390/act14110562
