The variation of total oxygen (T.O) content, characterization of inclusions, slag composition, and off-gas behavior during the smelting process of silicon-deoxidization bearing steel were investigated with industrial experiments. The change of content of combined oxygen during RH (Ruhrstahl–Hereaeus vacuum degassing furnace) process was calculated and compared with T.O content change. It is found that the decrease of oxygen content is mainly caused by the removal of dissolved oxygen rather than the removal of oxides during RH process. Carbon was found to be a strong deoxidizer (stronger than aluminum) in high vacuum degree. Top slag is an oxygen source of the deoxidization process, leading to the re-oxidization of liquid steel, even though the FeO content is low in top slag. During the RH process, the change of oxygen mainly exists in three processes: 1) Deoxidization reaction in vacuum chamber, 2) oxygen mass transfer process between liquid steel out from a vacuum chamber and in ladle, and 3) oxygen mass transfer between ladle slag and liquid steel. It depends mainly on the mass transfer of the oxygen in the liquid steel.
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