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Micromachines
Volume 10
Issue 11
10.3390/mi10110764
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Article

A Silicon Nanowire Array Biosensor Fabricated by Complementary Metal Oxide Semiconductor Technique for Highly Sensitive and Selective Detection of Serum Carcinoembryonic Antigen

by
Xun Yang
1,*,
Yun Fan
1,
Zhenhua Wu
2,* and
Chaoran Liu
3
1
School of Electronic and Information Engineering, Foshan University, Foshan 528000, China
2
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
3
College of Electronics and Information, Hangzhou Dianzi University, Hangzhou 310018, China
*
Authors to whom correspondence should be addressed.
Micromachines 2019, 10(11), 764; https://doi.org/10.3390/mi10110764
Submission received: 3 October 2019 / Revised: 31 October 2019 / Accepted: 6 November 2019 / Published: 11 November 2019
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Abstract

In this paper, we present a highly sensitive and selective detection of serum carcinoembryonic antigen (CEA) based on silicon nanowire (SiNW) array device. With the help of traditional microfabrication technology, low-cost and highly controllable SiNW array devices were fabricated. After a series of surface modification processes, SiNW array biosensors show rapid and reliable response to CEA; the detection limit of serum CEA was 10 fg/mL, the current signal is linear with the logarithm of serum CEA concentration in the range of 10 fg/mL to 100 pg/mL. In this work, SiNW array biosensors can obtain strong signal and high signal-to-noise ratio; these advantages can reduce the production cost of the SiNW-based system and promote the application of SiNWs in the field of tumor marker detection.
Keywords: carcinoembryonic antigen; silicon nanowire array; highly sensitive; highly selective; low cost carcinoembryonic antigen; silicon nanowire array; highly sensitive; highly selective; low cost

Share and Cite

MDPI and ACS Style

Yang, X.; Fan, Y.; Wu, Z.; Liu, C. A Silicon Nanowire Array Biosensor Fabricated by Complementary Metal Oxide Semiconductor Technique for Highly Sensitive and Selective Detection of Serum Carcinoembryonic Antigen. Micromachines 2019, 10, 764. https://doi.org/10.3390/mi10110764

AMA Style

Yang X, Fan Y, Wu Z, Liu C. A Silicon Nanowire Array Biosensor Fabricated by Complementary Metal Oxide Semiconductor Technique for Highly Sensitive and Selective Detection of Serum Carcinoembryonic Antigen. Micromachines. 2019; 10(11):764. https://doi.org/10.3390/mi10110764

Chicago/Turabian Style

Yang, Xun, Yun Fan, Zhenhua Wu, and Chaoran Liu. 2019. "A Silicon Nanowire Array Biosensor Fabricated by Complementary Metal Oxide Semiconductor Technique for Highly Sensitive and Selective Detection of Serum Carcinoembryonic Antigen" Micromachines 10, no. 11: 764. https://doi.org/10.3390/mi10110764

APA Style

Yang, X., Fan, Y., Wu, Z., & Liu, C. (2019). A Silicon Nanowire Array Biosensor Fabricated by Complementary Metal Oxide Semiconductor Technique for Highly Sensitive and Selective Detection of Serum Carcinoembryonic Antigen. Micromachines, 10(11), 764. https://doi.org/10.3390/mi10110764

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