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Open AccessArticle

Research on the Hydrophobicity of Square Column Structures on Monocrystalline Silicon Fabricated Using Micro-Machining

by Ziyang Cao 1,2,*, Wenyu Ding 1,2, Zhenwu Ma 1,2, Bangfu Wang 1,2 and Zhongwang Wang 1,2
1
College of Mechanical Engineering, Suzhou University of Science and Technology, Suzhou 215009, China
2
Suzhou Key Laboratory of Precision and Efficient Machining Technology, Suzhou 215009, China
*
Author to whom correspondence should be addressed.
Micromachines 2019, 10(11), 763; https://doi.org/10.3390/mi10110763
Received: 3 October 2019 / Revised: 5 November 2019 / Accepted: 9 November 2019 / Published: 11 November 2019
The theoretical prediction models of contact angle were constructed by considering the interface free energy. Then, the square column structure on monocrystalline silicon was fabricated using micro-milling. The rationality of prediction models was validated by regulating the parameters of the square column. It should be mentioned that the whole construction process was facile and efficient. After processing, the hydrophobicity of monocrystalline silicon with the square column structure was improved. The static contact angle of the processed monocrystalline silicon reached 165.8° when the side length of the square column was 60 μm. In addition, the correctness of the prediction models was verified from the perspective of molecular dynamics. The prediction models of contact angle were of great value for the practical application. View Full-Text
Keywords: prediction model; square column structure; hydrophobicity; micro-milling; molecular dynamics prediction model; square column structure; hydrophobicity; micro-milling; molecular dynamics
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Cao, Z.; Ding, W.; Ma, Z.; Wang, B.; Wang, Z. Research on the Hydrophobicity of Square Column Structures on Monocrystalline Silicon Fabricated Using Micro-Machining. Micromachines 2019, 10, 763.

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