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Journal: Micromachines, 2018
Volume: 9
Number: 128

Article: Method of Measuring the Mismatch of Parasitic Capacitance in MEMS Accelerometer Based on Regulating Electrostatic Stiffness
Authors: by Xianshan Dong, Shaohua Yang, Junhua Zhu, Yunfei En and Qinwen Huang
Link: https://www.mdpi.com/2072-666X/9/3/128

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