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Journal: Micromachines, 2017
Volume: 8
Number: 211
Article:
DC Microplasma Jet for Local a:C-H Deposition Operated in SEM Chamber
Authors:
by
Khanit Matra, Hiroshi Furuta and Akimitsu Hatta
Link:
https://www.mdpi.com/2072-666X/8/7/211
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