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Journal: Micromachines, 2016
Volume: 7
Number: 30
Article:
CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology
Authors:
by
Jose Luis Muñoz-Gamarra, Arantxa Uranga and Nuria Barniol
Link:
https://www.mdpi.com/2072-666X/7/2/30
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