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Micromachines 2014, 5(4), 1135-1160;

Magnetic Shape Memory Microactuators

Institute of Microstructure Technology, Karlsruhe Institute of Technology (KIT), Postfach 3640, 76021 Karlsruhe, Germany
These authors contributed equally to this work.
Author to whom correspondence should be addressed.
Received: 29 September 2014 / Revised: 1 November 2014 / Accepted: 1 November 2014 / Published: 18 November 2014
(This article belongs to the Special Issue Microactuators)
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By introducing smart materials in micro systems technologies, novel smart microactuators and sensors are currently being developed, e.g., for mobile, wearable, and implantable MEMS (Micro-electro-mechanical-system) devices. Magnetic shape memory alloys (MSMAs) are a promising material system as they show multiple coupling effects as well as large, abrupt changes in their physical properties, e.g., of strain and magnetization, due to a first order phase transformation. For the development of MSMA microactuators, considerable efforts are undertaken to fabricate MSMA foils and films showing similar and just as strong effects compared to their bulk counterparts. Novel MEMS-compatible technologies are being developed to enable their micromachining and integration. This review gives an overview of material properties, engineering issues and fabrication technologies. Selected demonstrators are presented illustrating the wide application potential. View Full-Text
Keywords: microsystems technology; microactuation; smart materials; ferromagnetism; shape memory alloys; thin films microsystems technology; microactuation; smart materials; ferromagnetism; shape memory alloys; thin films

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MDPI and ACS Style

Kohl, M.; Gueltig, M.; Pinneker, V.; Yin, R.; Wendler, F.; Krevet, B. Magnetic Shape Memory Microactuators. Micromachines 2014, 5, 1135-1160.

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