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Review

Surface Acoustic Wave Devices: New Mechanisms, Enabling Techniques, and Application Frontiers

1
Industry-Education-Research Institute of Advanced Materials and Technology for Integrated Circuits, Anhui University, Hefei 230601, China
2
Hangzhou Institute of Technology, Xidian University, Hangzhou 311200, China
3
School of Information Engineering, Xi’an Eurasia University, Xi’an 710065, China
4
Ministry of Education Key Laboratory of RF Circuits and Systems, Hangzhou Dianzi University, Hangzhou 310018, China
*
Authors to whom correspondence should be addressed.
Micromachines 2026, 17(4), 494; https://doi.org/10.3390/mi17040494
Submission received: 27 March 2026 / Revised: 13 April 2026 / Accepted: 13 April 2026 / Published: 17 April 2026
(This article belongs to the Special Issue Surface and Bulk Acoustic Wave Devices, 2nd Edition)

Abstract

Surface Acoustic Wave (SAW) technology, long central to analog signal processing and RF filtering, is undergoing a major renewal. Driven by advances that decouple SAWs from traditional piezoelectric materials and fixed-function devices, the field is gaining unprecedented control over acoustic, optical, and electronic interactions at the micro and nanoscale. This review synthesizes these developments across four fronts: new physical mechanisms for SAW manipulation, emerging material platforms, ranging from thin films to 2D systems, along with reconfigurable device architectures and circuits, and the expanding landscape of applications they enable. Optical methods are reshaping how SAWs are generated and controlled, bypassing the limits of conventional electromechanical coupling. Coherent optical excitation of high-Q SAW cavities via Brillouin-like optomechanical interactions now grants access to modes in non-piezoelectric substrates such as diamond and silicon, while on-chip SAW excitation in photonic waveguides through backward stimulated Brillouin scattering opens new integrated sensing routes. In parallel, magneto-acoustic experiments have revealed nonreciprocal SAW diffraction from resonant scattering in magnetoelastic gratings. On the device side, ZnO thin-film transistors integrated on LiNbO3 exploit acoustoelectric coupling to realize voltage-tunable phase shifters; UHF Z-shaped delay lines achieve high sensitivity in a compact footprint; and parametric synthesis of wideband, multi-stage lattice filters targets 5G-class performance. Atomistic simulations show that SAW propagation in 2D MXene films can be engineered via surface terminations, while aerosol jet printing and SAW-assisted particle patterning provide agile, cleanroom-light fabrication of microfluidic and magnetic components. These advances enable applications ranging from hybrid quantum systems and quantum links to lab-on-a-chip particle control, SBS-based and UHF sensing, reconfigurable RF front-ends, and soft robotic actuators based on patterned magnetic composites. At the same time, optical techniques offer non-contact probes of dissipation, and MXenes and other emerging materials open new regimes of acoustic control. Conclusively, they are transforming SAW technology into a versatile, programmable platform for mediating complex interactions in next-generation electronic, photonic, and quantum systems.
Keywords: surface acoustic waves (SAWs); optomechanical coupling; Brillouin scattering/optomechanics; acoustoelectric coupling; 2D materials and MXenes; non-piezoelectric substrates; lab-on-a-chip microfluidics; hybrid quantum acoustic–photonic systems surface acoustic waves (SAWs); optomechanical coupling; Brillouin scattering/optomechanics; acoustoelectric coupling; 2D materials and MXenes; non-piezoelectric substrates; lab-on-a-chip microfluidics; hybrid quantum acoustic–photonic systems
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MDPI and ACS Style

Xu, H.; Liu, X.; Ye, W.; Zeng, X.; Qadir, A.; Chen, J. Surface Acoustic Wave Devices: New Mechanisms, Enabling Techniques, and Application Frontiers. Micromachines 2026, 17, 494. https://doi.org/10.3390/mi17040494

AMA Style

Xu H, Liu X, Ye W, Zeng X, Qadir A, Chen J. Surface Acoustic Wave Devices: New Mechanisms, Enabling Techniques, and Application Frontiers. Micromachines. 2026; 17(4):494. https://doi.org/10.3390/mi17040494

Chicago/Turabian Style

Xu, Hongsheng, Xiangyu Liu, Weihao Ye, Xiangyu Zeng, Akeel Qadir, and Jinkai Chen. 2026. "Surface Acoustic Wave Devices: New Mechanisms, Enabling Techniques, and Application Frontiers" Micromachines 17, no. 4: 494. https://doi.org/10.3390/mi17040494

APA Style

Xu, H., Liu, X., Ye, W., Zeng, X., Qadir, A., & Chen, J. (2026). Surface Acoustic Wave Devices: New Mechanisms, Enabling Techniques, and Application Frontiers. Micromachines, 17(4), 494. https://doi.org/10.3390/mi17040494

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