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Journal: Micromachines, 2025
Volume: 16
Number: 912
912
Article: A Novel Polysilicon-Fill-Strengthened Etch-Through 3D Trench Electrode Detector: Fabrication Methods and Electrical Property Simulations
Authors: by Xuran Zhu, Zheng Li, Zhiyu Liu, Tao Long, Jun Zhao, Xinqing Li, Manwen Liu and Meishan Wang
Link: https://www.mdpi.com/2072-666X/16/8/912

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