Choi, T.-M.; Jung, E.-S.; Yoo, J.-U.; Lee, H.-R.; Yoon, S.; Pyo, S.-G.
In Situ Pre-Metallization Cleaning of CoSi2 Contact-Hole Patterns with Optimized Etching Process. Micromachines 2024, 15, 1409.
https://doi.org/10.3390/mi15121409
AMA Style
Choi T-M, Jung E-S, Yoo J-U, Lee H-R, Yoon S, Pyo S-G.
In Situ Pre-Metallization Cleaning of CoSi2 Contact-Hole Patterns with Optimized Etching Process. Micromachines. 2024; 15(12):1409.
https://doi.org/10.3390/mi15121409
Chicago/Turabian Style
Choi, Tae-Min, Eun-Su Jung, Jin-Uk Yoo, Hwa-Rim Lee, Songhun Yoon, and Sung-Gyu Pyo.
2024. "In Situ Pre-Metallization Cleaning of CoSi2 Contact-Hole Patterns with Optimized Etching Process" Micromachines 15, no. 12: 1409.
https://doi.org/10.3390/mi15121409
APA Style
Choi, T.-M., Jung, E.-S., Yoo, J.-U., Lee, H.-R., Yoon, S., & Pyo, S.-G.
(2024). In Situ Pre-Metallization Cleaning of CoSi2 Contact-Hole Patterns with Optimized Etching Process. Micromachines, 15(12), 1409.
https://doi.org/10.3390/mi15121409