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Journal: Micromachines, 2023
Volume: 14
Number: 1696
Article:
Finite Element Study for Mass Sensitivity of Love Surface Acoustic Wave Sensor with Si3N4-SiO2 Double-Covered Waveguiding Layer
Authors:
by
Luming Li, Mingyong Zhou, Lei Huang and Bingyan Jiang
Link:
https://www.mdpi.com/2072-666X/14/9/1696
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