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Journal: Micromachines, 2023
Volume: 14
Number: 869
Article:
Research on a Method to Improve the Temperature Performance of an All-Silicon Accelerometer
Authors:
by
Guowen Liu, Yu Liu, Xiao Ma, Xuefeng Wang, Xudong Zheng and Zhonghe Jin
Link:
https://www.mdpi.com/2072-666X/14/4/869
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