MEMS Inertial Device

MEMS inertial devices, including MEMS gyroscopes and MEMS accelerometers, are widely used sensors in the MEMS technology and instrumentation research field. They have the advantages of small size, light weight, low cost, strong batch production capacity, and good impact resistance. MEMS inertial devices have important application value and broad application prospects in the fields of national economy, national defense, and military. The development of the current information intelligence era has brought new development opportunities for MEMS inertial devices. With the progress of semiconductor processing technology and the improvement of measurement and control technology, the performance indicators of MEMS inertial devices have significantly improved, and they are replacing traditional inertial devices in more and more application areas.This special report focuses on all topics related to the structural design, manufacturing, measurement and control technology, data processing, and engineering applications of MEMS inertial devices, providing ideas for the difficulties faced by the further development of MEMS inertial devices.