Ren, X.; Yao, S.X.; Zhu, J.; Deng, Z.; Wang, Y.; Zhang, B.; Zeng, Z.; Zhai, H.
High-Precision Ultra-Long Air Slit Fabrication Based on MEMS Technology for Imaging Spectrometers. Micromachines 2023, 14, 2198.
https://doi.org/10.3390/mi14122198
AMA Style
Ren X, Yao SX, Zhu J, Deng Z, Wang Y, Zhang B, Zeng Z, Zhai H.
High-Precision Ultra-Long Air Slit Fabrication Based on MEMS Technology for Imaging Spectrometers. Micromachines. 2023; 14(12):2198.
https://doi.org/10.3390/mi14122198
Chicago/Turabian Style
Ren, Xiaoyu, Selina X. Yao, Jiacheng Zhu, Zejun Deng, Yijia Wang, Baoshun Zhang, Zhongming Zeng, and Hao Zhai.
2023. "High-Precision Ultra-Long Air Slit Fabrication Based on MEMS Technology for Imaging Spectrometers" Micromachines 14, no. 12: 2198.
https://doi.org/10.3390/mi14122198
APA Style
Ren, X., Yao, S. X., Zhu, J., Deng, Z., Wang, Y., Zhang, B., Zeng, Z., & Zhai, H.
(2023). High-Precision Ultra-Long Air Slit Fabrication Based on MEMS Technology for Imaging Spectrometers. Micromachines, 14(12), 2198.
https://doi.org/10.3390/mi14122198