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Journal: Micromachines, 2022
Volume: 13
Number: 1029
Article:
High-Frequency and Spectrum-Clean Shear-Horizontal Acoustic Wave Resonators with AlN Overlay
Authors:
by
Zonglin Wu, Shuxian Wu, Feihong Bao and Jie Zou
Link:
https://www.mdpi.com/2072-666X/13/7/1029
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