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Journal: Micromachines, 2022
Volume: 13
Number: 1979

Article: Development of MEMS Airflow Volumetric Flow Sensing System with Single Piezoelectric Micromachined Ultrasonic Transducer (PMUT) Array
Authors: by Xueying Xiu, Haolin Yang, Meilin Ji, Haochen Lv and Songsong Zhang
Link: https://www.mdpi.com/2072-666X/13/11/1979

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