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Journal: Micromachines, 2022
Volume: 13
Number: 1705

Article: Temperature Stable Piezoelectric Imprint of Epitaxial Grown PZT for Zero-Bias Driving MEMS Actuator Operation
Authors: by Marco Teuschel, Paul Heyes, Samu Horvath, Christian Novotny and Andrea Rusconi Clerici
Link: https://www.mdpi.com/2072-666X/13/10/1705

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