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Article

Efficient Optomechanical Mode-Shape Mapping of Micromechanical Devices

1
Department of Physics, Technical University of Munich, 85748 Garching, Germany
2
Munich Center for Quantum Science and Technology (MCQST), 80799 Munich, Germany
3
Institute for Advanced Study, Technical University of Munich, 85748 Garching, Germany
4
Walter Schottky Institute, Technical University of Munich, 85748 Garching, Germany
*
Author to whom correspondence should be addressed.
Academic Editor: Joshua En-yuan Lee
Micromachines 2021, 12(8), 880; https://doi.org/10.3390/mi12080880
Received: 21 June 2021 / Revised: 21 July 2021 / Accepted: 22 July 2021 / Published: 27 July 2021
Visualizing eigenmodes is crucial in understanding the behavior of state-of-the-art micromechanical devices. We demonstrate a method to optically map multiple modes of mechanical structures simultaneously. The fast and robust method, based on a modified phase-lock loop, is demonstrated on a silicon nitride membrane and shown to outperform three alternative approaches. Line traces and two-dimensional maps of different modes are acquired. The high quality data enables us to determine the weights of individual contributions in superpositions of degenerate modes. View Full-Text
Keywords: optomechanics; mode-mapping; MEMS; phase-lock loop; silicon-nitride; membrane optomechanics; mode-mapping; MEMS; phase-lock loop; silicon-nitride; membrane
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MDPI and ACS Style

Hoch, D.; Haas, K.-J.; Moller, L.; Sommer, T.; Soubelet, P.; Finley, J.J.; Poot, M. Efficient Optomechanical Mode-Shape Mapping of Micromechanical Devices. Micromachines 2021, 12, 880. https://doi.org/10.3390/mi12080880

AMA Style

Hoch D, Haas K-J, Moller L, Sommer T, Soubelet P, Finley JJ, Poot M. Efficient Optomechanical Mode-Shape Mapping of Micromechanical Devices. Micromachines. 2021; 12(8):880. https://doi.org/10.3390/mi12080880

Chicago/Turabian Style

Hoch, David, Kevin-Jeremy Haas, Leopold Moller, Timo Sommer, Pedro Soubelet, Jonathan J. Finley, and Menno Poot. 2021. "Efficient Optomechanical Mode-Shape Mapping of Micromechanical Devices" Micromachines 12, no. 8: 880. https://doi.org/10.3390/mi12080880

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