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Journal: Micromachines, 2021
Volume: 12
Number: 684
Article:
A Study on Capacitive Micromachined Ultrasonic Transducer Periodic Sparse Array
Authors:
by
Tian Zhang, Wendong Zhang, Xingling Shao, Yuhua Yang, Zhihao Wang, Yang Wu and Yu Pei
Link:
https://www.mdpi.com/2072-666X/12/6/684
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