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Micromachines
Volume 11
Issue 9
10.3390/mi11090829
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Article

3D AND-Type Stacked Array for Neuromorphic Systems

by
Taejin Jang
1,2,
Suhyeon Kim
1,2,
Jeesoo Chang
1,
Kyung Kyu Min
1,2,
Sungmin Hwang
1,2,
Kyungchul Park
1,2,
Jong-Ho Lee
1,2 and
Byung-Gook Park
1,*
1
Department of Electrical and Computer Engineering, Seoul National University, Seoul 08826, Korea
2
Inter-university Semiconductor Research Center (ISRC), Seoul 08826, Korea
*
Author to whom correspondence should be addressed.
Micromachines 2020, 11(9), 829; https://doi.org/10.3390/mi11090829
Submission received: 20 July 2020 / Revised: 26 August 2020 / Accepted: 30 August 2020 / Published: 31 August 2020
(This article belongs to the Special Issue NANO KOREA 2020)
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Abstract

NOR/AND flash memory was studied in neuromorphic systems to perform vector-by-matrix multiplication (VMM) by summing the current. Because the size of NOR/AND cells exceeds those of other memristor synaptic devices, we proposed a 3D AND-type stacked array to reduce the cell size. Through a tilted implantation method, the conformal sources and drains of each cell could be formed, with confirmation by a technology computer aided design (TCAD) simulation. In addition, the cell-to-cell variation due to the etch slope could be eliminated by controlling the deposition thickness of the cells. The suggested array can be beneficial in simple program/inhibit schemes given its use of Fowler–Nordheim (FN) tunneling because the drain lines and source lines are parallel. Therefore, the conductance of each synaptic device can be updated at low power level.
Keywords: neuromorphic; 3D AND-type synapse array; flash memory; Fowler–Nordheim tunneling neuromorphic; 3D AND-type synapse array; flash memory; Fowler–Nordheim tunneling

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MDPI and ACS Style

Jang, T.; Kim, S.; Chang, J.; Min, K.K.; Hwang, S.; Park, K.; Lee, J.-H.; Park, B.-G. 3D AND-Type Stacked Array for Neuromorphic Systems. Micromachines 2020, 11, 829. https://doi.org/10.3390/mi11090829

AMA Style

Jang T, Kim S, Chang J, Min KK, Hwang S, Park K, Lee J-H, Park B-G. 3D AND-Type Stacked Array for Neuromorphic Systems. Micromachines. 2020; 11(9):829. https://doi.org/10.3390/mi11090829

Chicago/Turabian Style

Jang, Taejin, Suhyeon Kim, Jeesoo Chang, Kyung Kyu Min, Sungmin Hwang, Kyungchul Park, Jong-Ho Lee, and Byung-Gook Park. 2020. "3D AND-Type Stacked Array for Neuromorphic Systems" Micromachines 11, no. 9: 829. https://doi.org/10.3390/mi11090829

APA Style

Jang, T., Kim, S., Chang, J., Min, K. K., Hwang, S., Park, K., Lee, J.-H., & Park, B.-G. (2020). 3D AND-Type Stacked Array for Neuromorphic Systems. Micromachines, 11(9), 829. https://doi.org/10.3390/mi11090829

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