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Journal: Micromachines, 2020
Volume: 11
Number: 804
Article:
A Simple Low-Temperature Glass Bonding Process with Surface Activation by Oxygen Plasma for Micro/Nanofluidic Devices
Authors:
by
Koki Shoda, Minori Tanaka, Kensuke Mino and Yutaka Kazoe
Link:
https://www.mdpi.com/2072-666X/11/9/804
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