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Open AccessArticle

Bistable Threshold Humidity Sensor Switch with Rectangular Bimorph Bending Plate

Solid-State Electronics Laboratory, Technische Universität Dresden, 01062 Dresden, Germany
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Micromachines 2020, 11(6), 569; https://doi.org/10.3390/mi11060569
Received: 19 April 2020 / Revised: 29 May 2020 / Accepted: 31 May 2020 / Published: 3 June 2020
Energy-autonomous bistable threshold sensor switches have the potential to reduce costs because they do not need any electrical energy supply for monitoring physical quantities, such as relative humidity. In previous work, a bistable beam-like sensor switch with switching hysteresis was manufactured from sheet metal and a partially coated water vapor-sensitive hydrogel (poly(vinyl alcohol)/poly(acryl acid)). Based on the beam theory, a corresponding mechanical model was developed. However, bending plates should be used instead of bending beams to separate the humidity to be measured from the electrical contacts. For this reason, this work deals with the development and realization of a mechanical model based on the plate theory to describe the deflection of a silicon bimorph bending plate partially coated with hydrogel that swells with increasing humidity. For implementing a switching hysteresis a plasma-enhanced chemical vapor deposition silicon dioxide (SiO2) layer is used, which was deposited and structured on top of the silicon plate. The hydrogel layer itself is patterned on the surface of the bending plate using a stamp technique. To validate the mechanical model, the switching hysteresis of the miniaturized sensor switch was measured optically by a camera measurement device. View Full-Text
Keywords: sensor switch; switching hysteresis; threshold sensor; bistable sensor; plate theory; bimorph effect; relative humidity sensing sensor switch; switching hysteresis; threshold sensor; bistable sensor; plate theory; bimorph effect; relative humidity sensing
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Gulnizkij, N.; Gerlach, G. Bistable Threshold Humidity Sensor Switch with Rectangular Bimorph Bending Plate. Micromachines 2020, 11, 569.

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