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Journal: Micromachines, 2020
Volume: 11
Number: 925
Article:
A Scalable and Low Stress Post-CMOS Processing Technique for Implantable Microsensors
Authors:
by
Ah-Hyoung Lee, Jihun Lee, Farah Laiwalla, Vincent Leung, Jiannan Huang, Arto Nurmikko and Yoon-Kyu Song
Link:
https://www.mdpi.com/2072-666X/11/10/925
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