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Journal: Micromachines, 2019
Volume: 10
Number: 589
589
Article: A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer
Authors: by Jian Yang, Meng Zhang, Yurong He, Yan Su, Guowei Han, Chaowei Si, Jin Ning, Fuhua Yang and Xiaodong Wang
Link: https://www.mdpi.com/2072-666X/10/9/589

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