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Journal: Micromachines, 2019
Volume: 10
Number: 571

Article: A Silicon Resonant Accelerometer Embedded in An Isolation Frame with Stress Relief Anchor
Authors: by Jian Cui, Haibing Yang, Dong Li, Ziyang Song and Qiancheng Zhao
Link: https://www.mdpi.com/2072-666X/10/9/571

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