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Open AccessArticle

A Resonant Pressure Sensor Based upon Electrostatically Comb Driven and Piezoresistively Sensed Lateral Resonators

by Xiaoqing Shi 1,2, Sen Zhang 1,2, Deyong Chen 1,2,*, Junbo Wang 1,2,*, Jian Chen 1,2, Bo Xie 1, Yulan Lu 1,2 and Yadong Li 1,2
1
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
2
University of Chinese Academy of Sciences, Beijing 100049, China
*
Authors to whom correspondence should be addressed.
Micromachines 2019, 10(7), 460; https://doi.org/10.3390/mi10070460
Received: 9 May 2019 / Revised: 6 June 2019 / Accepted: 25 June 2019 / Published: 8 July 2019
(This article belongs to the Special Issue MEMS/NEMS Sensors: Fabrication and Application, Volume II)
This study proposes a microfabricated resonant pressure sensor in which a pair of double-ended tuning forks were utilized as resonators where comb electrodes and single-crystal silicon-based piezoresistors were used for electrostatic excitation and piezoresistive detection, respectively. In operations, pressures under measurements deform the pressure-sensitive diaphragm to cause stress variations of two resonators distributed on the central and side positions of the pressure-sensitive diaphragm, where the corresponding changes of the intrinsic resonant frequencies are then captured piezoresistively. The developed resonant pressure sensors were fabricated based on MEMS with open-loop and closed-loop characterizations conducted. Key sensing parameters including quality factors, differential pressure/temperature sensitivities and fitting errors were quantified as higher than 17,000, 48.24 Hz/kPa, 0.15 Hz/°C and better than 0.01% F.S. (140 kpa), respectively. In comparison to previously reported resonant pressure sensors driven by parallel-plate electrodes, the developed sensor in this study is featured with a lower temperature sensitivity and a higher stability. View Full-Text
Keywords: resonant pressure microsensor; electrostatic excitation; piezoresistive detection; double-ended tuning forks; comb drive; MEMS resonant pressure microsensor; electrostatic excitation; piezoresistive detection; double-ended tuning forks; comb drive; MEMS
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Shi, X.; Zhang, S.; Chen, D.; Wang, J.; Chen, J.; Xie, B.; Lu, Y.; Li, Y. A Resonant Pressure Sensor Based upon Electrostatically Comb Driven and Piezoresistively Sensed Lateral Resonators. Micromachines 2019, 10, 460.

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