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Journal: Micromachines, 2019
Volume: 10
Number: 460
460
Article: A Resonant Pressure Sensor Based upon Electrostatically Comb Driven and Piezoresistively Sensed Lateral Resonators
Authors: by Xiaoqing Shi, Sen Zhang, Deyong Chen, Junbo Wang, Jian Chen, Bo Xie, Yulan Lu and Yadong Li
Link: https://www.mdpi.com/2072-666X/10/7/460

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