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Journal: Micromachines, 2019
Volume: 10
Number: 420
420
Article: Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication
Authors: by Meng Zhang, Jian Yang, Yurong He, Fan Yang, Yongmei Zhao, Fen Xue, Guowei Han, Chaowei Si and Jin Ning
Link: https://www.mdpi.com/2072-666X/10/6/420

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