Rao, K.;                     Wei, X.;                     Zhang, S.;                     Zhang, M.;                     Hu, C.;                     Liu, H.;                     Tu, L.-C.    
        A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process. Micromachines 2019, 10, 380.
    https://doi.org/10.3390/mi10060380
    AMA Style
    
                                Rao K,                                 Wei X,                                 Zhang S,                                 Zhang M,                                 Hu C,                                 Liu H,                                 Tu L-C.        
                A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process. Micromachines. 2019; 10(6):380.
        https://doi.org/10.3390/mi10060380
    
    Chicago/Turabian Style
    
                                Rao, Kang,                                 Xiaoli Wei,                                 Shaolin Zhang,                                 Mengqi Zhang,                                 Chenyuan Hu,                                 Huafeng Liu,                                 and Liang-Cheng Tu.        
                2019. "A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process" Micromachines 10, no. 6: 380.
        https://doi.org/10.3390/mi10060380
    
    APA Style
    
                                Rao, K.,                                 Wei, X.,                                 Zhang, S.,                                 Zhang, M.,                                 Hu, C.,                                 Liu, H.,                                 & Tu, L.-C.        
        
        (2019). A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process. Micromachines, 10(6), 380.
        https://doi.org/10.3390/mi10060380