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A Measurement-Data-Driven Control Approach towards Variance Reduction of Micromachined Resonant Accelerometer under Multi Unknown Disturbances

1
Research & Development Institute of Northwestern Polytechnical University in Shenzhen, Shenzhen 710000, China
2
MOE Key Laboratory of Micro and Nano Systems for Aerospace, Northwestern Polytechnical University, Xi’an 710072, China
3
Department of mechatronic engineering, Northeast Forestry University, Harbin 150040, China
4
School of electronic information engineering, Xi’an Technological University, Xi’an 710021, China
*
Authors to whom correspondence should be addressed.
Micromachines 2019, 10(5), 294; https://doi.org/10.3390/mi10050294
Received: 12 March 2019 / Revised: 17 April 2019 / Accepted: 23 April 2019 / Published: 30 April 2019
(This article belongs to the Special Issue Advanced MEMS/NEMS Technology, Volume II)
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Abstract

This paper first presents an adaptive expectation-maximization (AEM) control algorithm based on a measurement-data-driven model to reduce the variance of microelectromechanical system (MEMS) accelerometer sensor under multi disturbances. Significantly different characteristics of the disturbances, consisting of drastic-magnitude, short-duration vibration in the external environment, and slowly-varying, long-duration fluctuation inside the sensor are first constructed together with the measurement model of the accelerometer. Next, through establishing a data-driven model based on a historical small measurement sample, the window length of filter of the presented algorithm is adaptively chosen to estimate the sensor state and identify these disturbances simultaneously. Simulation results of the proposed AEM algorithm based on experimental test are compared with the Kalman filter (KF), least mean square (LMS), and regular EM (REM) methods. Variances of the estimated equivalent input under static condition are 0.212 mV, 0.149 mV, 0.015 mV, and 0.004 mV by the KF, LMS, REM, and AEM, respectively. Under dynamic conditions, the corresponding variances are 35.5 mV, 2.07 mV, 2.0 mV, and 1.45 mV, respectively. The variances under static condition based on the proposed method are reduced to 1.9%, 2.8%, and 27.3%, compared with the KF, LMS, and REM methods, respectively. The corresponding variances under dynamic condition are reduced to 4.1%, 70.1%, and 72.5%, respectively. The effectiveness of the proposed method is verified to reduce the variance of the MEMS resonant accelerometer sensor. View Full-Text
Keywords: microelectromechanical system (MEMS) accelerometer; variance characteristic; unknown disturbance control; data-driven model microelectromechanical system (MEMS) accelerometer; variance characteristic; unknown disturbance control; data-driven model
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Shen, Q.; Yang, D.; Zhou, J.; Wu, Y.; Zhang, Y.; Yuan, W. A Measurement-Data-Driven Control Approach towards Variance Reduction of Micromachined Resonant Accelerometer under Multi Unknown Disturbances. Micromachines 2019, 10, 294.

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