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Concentric Split Aluminum with Silicon-Aluminum Nitride Annular Rings Resonators

School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China
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Micromachines 2019, 10(5), 296; https://doi.org/10.3390/mi10050296
Received: 31 March 2019 / Revised: 25 April 2019 / Accepted: 26 April 2019 / Published: 30 April 2019
(This article belongs to the Special Issue Advanced MEMS/NEMS Technology, Volume II)
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Abstract

This paper presents a novel approach of annular concentric split rings microelectromechanical resonators with tether configuration to reduce anchor loss and gives very high-quality factor (Q) 2.97 Million based on FEA (Finite Element Analysis) simulation. The operating frequencies of these resonators are 188.55 MHz to 188.62 MHz. When the proposed SR (square rectangle) hole shaped one dimensional phononic crystal (1D PnC), and two dimensional phononic crystal (2D PnC) structure consist of very wide and complete band gaps is applied to novel design rings MEMS resonators, the quality factor (Q) further improved to 19.7 Million and 1750 Million, respectively, by using the finite element method. It is also observed that band gaps become closer by reducing the value of filling fraction, and proposed SR PnC gives extensive peak attenuation. Moreover, harmonic response of ring resonator is verified by the perfect match layers (PML) technique surrounded by resonators with varying width 1.5λ, and 3λ effectively reduce the vibration displacement. View Full-Text
Keywords: phononic crystal; bandgap; anchor loss; high quality factor; Silicon-Aluminum Nitride (Si-AlN) Micro-Electro-Mechanical-Systems (MEMS) resonator phononic crystal; bandgap; anchor loss; high quality factor; Silicon-Aluminum Nitride (Si-AlN) Micro-Electro-Mechanical-Systems (MEMS) resonator
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Khan, M.A.; Bao, J.-F.; Bao, F.-H.; Zhou, X. Concentric Split Aluminum with Silicon-Aluminum Nitride Annular Rings Resonators. Micromachines 2019, 10, 296.

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