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Design Guidelines for Thermally Driven Micropumps of Different Architectures Based on Target Applications via Kinetic Modeling and Simulations

1
Institut Clément Ader (ICA), CNRS, INSA, ISAE-SUPAERO, Mines Albi, UPS, Université de Toulouse, 31400 Toulouse, France
2
Department of Mechanical Engineering, University of Thessaly, 38334 Volos, Greece
*
Author to whom correspondence should be addressed.
Micromachines 2019, 10(4), 249; https://doi.org/10.3390/mi10040249
Received: 15 March 2019 / Revised: 10 April 2019 / Accepted: 11 April 2019 / Published: 14 April 2019
(This article belongs to the Special Issue Gas Flows in Microsystems)
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Abstract

The manufacturing process and architecture of three Knudsen type micropumps are discussed and the associated flow performance characteristics are investigated. The proposed fabrication process, based on the deposition of successive dry film photoresist layers with low thermal conductivity, is easy to implement, adaptive to specific applications, cost-effective, and significantly improves thermal management. Three target application designs, requiring high mass flow rates (pump A), high pressure differences (pump B), and relatively high mass flow rates and pressure differences (pump C), are proposed. Computations are performed based on kinetic modeling via the infinite capillary theory, taking into account all foreseen manufacturing and operation constraints. The performance characteristics of the three pump designs in terms of geometry (number of parallel microchannels per stage and number of stages) and inlet pressure are obtained. It is found that pumps A and B operate more efficiently at pressures higher than 5 kPa and lower than 20 kPa, respectively, while the optimum operation range of pump C is at inlet pressures between 1 kPa and 20 kPa. In all cases, it is advisable to have the maximum number of stages as well as of parallel microchannels per stage that can be technologically realized. View Full-Text
Keywords: Knudsen pump; thermal transpiration; vacuum micropump; rarefied gas flow; kinetic theory; microfabrication; photolithography; microfluidics Knudsen pump; thermal transpiration; vacuum micropump; rarefied gas flow; kinetic theory; microfabrication; photolithography; microfluidics
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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López Quesada, G.; Tatsios, G.; Valougeorgis, D.; Rojas-Cárdenas, M.; Baldas, L.; Barrot, C.; Colin, S. Design Guidelines for Thermally Driven Micropumps of Different Architectures Based on Target Applications via Kinetic Modeling and Simulations. Micromachines 2019, 10, 249.

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