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Correction: Shen, X. et al. Research on the Disc Sensitive Structure of a Micro Optoelectromechanical System (MOEMS) Resonator Gyroscope. Micromachines, 2019, 10, 264
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Correction published on 16 May 2019, see Micromachines 2019, 10(5), 328.

Open AccessArticle

Research on the Disc Sensitive Structure of a Micro Optoelectromechanical System (MOEMS) Resonator Gyroscope

Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
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Micromachines 2019, 10(4), 264; https://doi.org/10.3390/mi10040264
Received: 20 March 2019 / Revised: 15 April 2019 / Accepted: 17 April 2019 / Published: 19 April 2019
(This article belongs to the Special Issue MEMS/NEMS Sensors: Fabrication and Application, Volume II)
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Abstract

A micro optoelectromechanical system (MOEMS) resonator gyroscope based on a waveguide micro-ring resonator was proposed. This sensor was operated by measuring the shift of the transmission spectrum. Modal analysis was carried out for the disc sensitive structure of the MOEMS resonator gyroscope (MOEMS-RG). We deduced the equations between the equivalent stiffness and voltage of each tuning electrode and the modal parameters. A comprehensive investigation of the influences of the structure parameters on the sensitivity noise of the MOEMS-RG is presented in this paper. The mechanical sensitivity and transducer sensitivities of the MOEMS-RG, with varying structural parameters, are calculated based on the finite-element method. Frequency response test and the fiber optic spectrometer displacement test were implemented to verify the reliability of the model. Research results indicate that the resonant frequencies of the operating modes are tested to be 5768.407 Hz and 5771.116 Hz and the resonant wavelength change ΔX was 0.08 nm for 45° rotation angle. The resonant wavelength, which has a good linear response in working range, changes from −0.071 nm to 0.080 μm. The MOEMS-RG, with an optimized disc sensitive structure, can detect the deformation of the sensitive membrane effectively, and has a high sensitivity. This resonator shows very large meff, low f 0 , and very high Q. Therefore, this resonator can provide a small A R W B ( 0.09 ° / h ), which makes it a promising candidate for a low-cost, batch-fabricated, small size inertial-grade MOEMS gyroscope. The multi-objective optimization method could be expanded to include other objectives, constraints, or variables relevant to all kinds of gyroscopes or other microelectromechanical systems devices. View Full-Text
Keywords: micro optoelectromechanical system (MOEMS); resonator gyroscope; waveguide micro-ring resonator; modal analysis; structural simulation; frequency response; optic displacement micro optoelectromechanical system (MOEMS); resonator gyroscope; waveguide micro-ring resonator; modal analysis; structural simulation; frequency response; optic displacement
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Shen, X.; Zhao, L.; Xia, D. Research on the Disc Sensitive Structure of a Micro Optoelectromechanical System (MOEMS) Resonator Gyroscope. Micromachines 2019, 10, 264.

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