Next Article in Journal
Design Guidelines for Thermally Driven Micropumps of Different Architectures Based on Target Applications via Kinetic Modeling and Simulations
Previous Article in Journal
A Continuous Flow-through Microfluidic Device for Electrical Lysis of Cells
Article Menu
Issue 4 (April) cover image

Export Article

Open AccessArticle

MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control

1,2, 1,2, 1,2 and 1,*
1
Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China
2
School of Instrument and Electronics, North University of China, Tai Yuan 030051, China
*
Author to whom correspondence should be addressed.
Micromachines 2019, 10(4), 248; https://doi.org/10.3390/mi10040248
Received: 16 February 2019 / Revised: 31 March 2019 / Accepted: 9 April 2019 / Published: 14 April 2019
  |  
PDF [5702 KB, uploaded 14 April 2019]
  |  

Abstract

In this paper, a novel temperature compensation method for a dual-mass MEMS gyroscope is proposed based on drive mode vibration characteristic compensation using a temperature variable resistor. Firstly, the drive and sense modes of the gyroscope re analyzed and investigated, and it is found that the scale factor is proportional to the drive mode amplitude controlling reference voltage. Then, the scale factor temperature compensation method is proposed, and a temperature variable resistor is utilized to compensate the drive amplitude working point and make it change with temperature. In addition, the temperature compensation circuit is designed and simulated. After that, the temperature bias drift is compensated in a modular output. The experimental results show that scale factor and bias variation during the temperature range from −40 °C to 60 °C decrease from 3.680% to 1.577% and 3.880% to 1.913%, respectively. In addition, the bias value improves from 103.395 °/s to 22.478 °/s (optimized 78.26%). The bias stability and angular rate walking parameter are also optimized to 45.97% and 16.08%, respectively, which verify the method proposed in this paper. View Full-Text
Keywords: dual-mass MEMS gyroscope; temperature compensation; scale factor; bias; drive mode; amplitude controlling dual-mass MEMS gyroscope; temperature compensation; scale factor; bias; drive mode; amplitude controlling
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
SciFeed

Share & Cite This Article

MDPI and ACS Style

Cui, M.; Huang, Y.; Wang, W.; Cao, H. MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control. Micromachines 2019, 10, 248.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Micromachines EISSN 2072-666X Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top