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Journal: MicromachinesVolume: 10Number: 167
Article: The Effects of Cold Arm Width and Metal Deposition on the Performance of a U-Beam Electrothermal MEMS Microgripper for Biomedical Applications
- Authors:
- Marija Cauchi1,*,
- Ivan Grech2 and
- Bertram Mallia3
- et al.
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