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Journal: Micromachines, 2019
Volume: 10
Number: 801

Article: Investigation of the Young’s Modulus and the Residual Stress of 4H-SiC Circular Membranes on 4H-SiC Substrates
Authors: by Jaweb Ben Messaoud, Jean-François Michaud, Dominique Certon, Massimo Camarda, Nicolò Piluso, Laurent Colin, Flavien Barcella and Daniel Alquier
Link: https://www.mdpi.com/2072-666X/10/12/801

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