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Journal: Materials, 2024
Volume: 17
Number: 1120
Article:
Effects of O2/Ar Ratio on Preparation and Dielectric Properties of CaZrO3 Films by Radio Frequency (RF) Magnetron Sputtering
Authors:
by
Mingjian Ding, Bing Xie, Ming Lv and Zhenya Lu
Link:
https://www.mdpi.com/1996-1944/17/5/1120
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