Mao, W.; Qi, R.; Wu, J.; Zhang, Z.; Wang, Z.
Evolution of Chemical, Structural, and Mechanical Properties of Titanium Nitride Films with Different Thicknesses Fabricated Using Pulsed DC Magnetron Sputtering. Materials 2024, 17, 6067.
https://doi.org/10.3390/ma17246067
AMA Style
Mao W, Qi R, Wu J, Zhang Z, Wang Z.
Evolution of Chemical, Structural, and Mechanical Properties of Titanium Nitride Films with Different Thicknesses Fabricated Using Pulsed DC Magnetron Sputtering. Materials. 2024; 17(24):6067.
https://doi.org/10.3390/ma17246067
Chicago/Turabian Style
Mao, Wei, Runze Qi, Jiali Wu, Zhe Zhang, and Zhanshan Wang.
2024. "Evolution of Chemical, Structural, and Mechanical Properties of Titanium Nitride Films with Different Thicknesses Fabricated Using Pulsed DC Magnetron Sputtering" Materials 17, no. 24: 6067.
https://doi.org/10.3390/ma17246067
APA Style
Mao, W., Qi, R., Wu, J., Zhang, Z., & Wang, Z.
(2024). Evolution of Chemical, Structural, and Mechanical Properties of Titanium Nitride Films with Different Thicknesses Fabricated Using Pulsed DC Magnetron Sputtering. Materials, 17(24), 6067.
https://doi.org/10.3390/ma17246067