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Journal: Materials, 2023
Volume: 16
Number: 5225

Article: Study of the Influence of the Irradiation Flux Density on the Formation of a Defect Structure in AlN in the Case of the Effect of Overlapping of the Heavy Ion Motion Trajectories in the Near-Surface Layer
Authors: by Yeugeniy V. Bikhert, Artem L. Kozlovskiy, Anatoli I. Popov and Maxim V. Zdorovets
Link: https://www.mdpi.com/1996-1944/16/15/5225

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