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Journal: Materials, 2022
Volume: 15
Number: 7612
Article:
Femtosecond Laser Fabrication of Anisotropic Structures in Phosphorus- and Boron-Doped Amorphous Silicon Films
Authors:
by
Dmitrii Shuleiko, Stanislav Zabotnov, Mikhail Martyshov, Dmitrii Amasev, Denis Presnov, Vyacheslav Nesterov, Leonid Golovan and Pavel Kashkarov
Link:
https://www.mdpi.com/1996-1944/15/21/7612
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